Getting stuck at Danchip

Sticky stuff

At our last meeting, myself and Torben discussed deadlines, holidays and defence day (D-Day). My hand in deadline is the first week in August after which I will go home to Ireland for a few weeks. Then in mid-September I will defend the project. At this point it would be beneficial to begin writing the chapter list and begin putting together the content. Again, I juggle between the benefits of LaTex and Word.

Danchip visit

The good news is that Simon and Rafael have some time to assist me on this project. Last week I took a visit to Danchip and put on the CSI gear (plus new beard mask) and entered the sombre world of the Danchip clean rooms to find my wafers. The Silicon (SI) wafers (5 in all) and photomask were still there which was a relief. However, each wafer was etched! I really do not remember etching all the wafers as we were initially to test one first as per my last report, and then proceed with the others. So this was not expected...

Problem?

At first, this seemed like something which could limit the project but in hindsight, it really did not matter that the wafers were etched with 30 μm deep structures. The photo resist should still be in place as the wafers were not (hopefully) treated after the etching process and according to Simon, the wafers can be re-etched to change the surface characteristics. I have created a process request for Danchip (sent to training @ Danchip) including the following:

As the liquid thins at the hot, evaporator end, high capillary pumping action is needed and a possible improvement in the wick surface might be by having smaller channels at the hot end. Kapton tape can protect certain areas of the pattern from the plasma etch

Wet etched undercut

1. Dry etching  - 2 wafers will be plasma etched such that the structures depth increase laterally across the wick (image below),
2. Wet etching - 2 wafers will be etched so that an undercut can be created under the photomask,
3. Cutting - cut out the wick sections and spacers using a Disco saw (there is a clean spare wafer and one that I have taken from the lab which would need to be cleaned before being brought back into the lab),
4. Bonding the wick sections and spacers together to form a heat pipe container.

Executing these processes in a timely manner will depend on Danchip's schedule. During my last etching session, one of the Danchip staff mentioned that I could perhaps have someone carry out the processes rather than train/learn how to use new equipment myself. Also, I am also not sure whether these processes will be accepted at the lab (this is why they request process plans in case someone tries something that could damage equipment). I will also enquire as to whether the laser cutter at DTU's Innovatorium could be useful for cutting the SI (although from experience, there might be residue left behind which could prevent the bonding process from working).

So hopefully next week, I can start making these heat pipes. Then, I will try to make them work...